offers several ozone delivery systems that are carefully designed
to meet the most stringent safety performance requirements while
delivering high purity ozone with very low cost of ownership.
These systems combine one or more ozone generators and servo-loop
control with IN USA's advanced ozone monitoring instrumentation
to provide a low-cost, turnkey system that can be customized to
meet your application requirements.
IN USA's Dissolved Ozone Delivery Systems offer high purity, bubble-free high concentration ozone for a wide range of semiconductor applications. The system is designed to provide dissolved ozone in water on demand, at the point of use for multi-bath applications.
Typical ozone delivery system features include:
size( 40''H x 24"W x 31"D)
or more ozone generators
ozone output indication and control
with host tool capability
safety monitoring subsystem and interlocks