Teledyne Instruments, Inc.
9970 Carroll Canyon Road,
San Diego, CA 92131, USA
Toll free: 1-800-798-4029
Phone: (1) 781-444-2929

Press Contact: Ben Battat
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IN USA Introduces New OG-5000 High Purity Ozone Generator for Semiconductor Applications
 November 13, 2003

Needham, Massachusetts, USA ?" IN USA Inc., a leading manufacturer of Ozone (O3) monitoring and control instrumentation, announces the introduction of its patent pending Series OG-5000 Ozone Generators, designed to produce high purity ozone gas at very high concentrations for a variety of semiconductor manufacturing applications. These applications include Chemical Vapor Deposition (CVD); Atomic Layer Deposition (ALD); Oxide growth; Surface conditioning; Ashing; Wet Processing; Particle Cleaning; Photoresist Removal; Epitaxy; and others.

Ozone gas is generated in the OG-5000 series by means of controlled electrical discharge. The addition of ppm levels of a "doping" or "spiking" gas increases the ozone production in the OG-5000 and, most importantly, ensures the stability of the ozone concentration over time. The unique design of the OG-5000 series generator combined with the unique materials used in the construction of the generating cells delivers an ozone-oxygen mixture of the highest purity and concentrations in the market.

The OG-5000 series of ozone generators are very compact and modular. This modular construction allows for the generator to be easily configured to meet a wide range of application and budget requirements. The OG-5000 series of generators are priced very competitively with the added benefit of requiring no consumables bringing the cost of ownership considerably down.

The OG-5000 series is available as a stand-alone ozone generator, or as part of a complete turnkey integrated ozone gas or DIO3 water delivery systems (Model ODS series).

IN USA, Inc. offers a complete line of ozone analyzers, monitors, sensors, destructs and controllers for gas or liquid phase measurements and a family of complete turnkey ozone gas or DIO3 water delivery systems. For more information, visit or contact the company at 9970 Carroll Canyon Road, San Diego, CA 92131, USA
Toll Free (US) 800-798-4029; Tel. (001) 781-444-2929;
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