dFFOZ™ Dissolved Ozone Sensor
IN USA, Inc. has recently introduced the Model dFFOZ™,
a state-of-the-art Dissolved Ozone Sensor designed for semiconductor
Wet Bench systems and many other industrial processes. The Model
dFFOZ Sensor provides continuous, in-situ, in-line measurement
of dissolved ozone in deionized water over the concentration range
of 0 to 150 milligrams/liter.
The Model dFFOZ Sensor is a "smart", plug-in sensor with on-board
calibration data, and is quickly and easily installed. It incorporates
IN USA 's innovative dual optical-path sample sensing technology
to provide unparalleled performance and virtually eliminate the
need for a reference gas measurement.
The Model dFFOZ Sensor is housed in a very compact, fire-retardant
polypropylene (FRPP) enclosure fitted with purge ports(other enclosures
available). Inlet/Outlet ports are industry-standard 3/4" Flaretek®
fittings. It is designed to be installed in-line right at the
Wet Bench Cleaning bath, thereby eliminating the waste and inconvenience
necessitated by side-stream sampling. The Model dFFOZ Sensor is
"clean-ready" for high purity semiconductor processes, and can
be installed in a full-flow recirculating stream at flow rates
up to 150 SLPM.
The Model dFFOZ sensor uses UV (ultraviolet) absorption to make
an absolute, high-accuracy measurement of ozone concentration
that is ozone specific and is not affected by background contaminants
in the process stream. The low-pressure, mercury vapor UV lamp
is the only component requiring scheduled maintenance, and typically
lasts up to 24 months.
A typical installation consists of the Model dFFOZ Sensor, a controller
(Mini-SCI or SCI-Mux), and an interconnecting Teflon®-jacketed
The Mini-SCI Controller provides powerful, microprocessor-based
control, display, and output capabilities. It includes a 20-character
alphanumeric, backlit LCD; 0-10 VDC and 4-20 mA opto-isolated
analog outputs; bi-directional RS232 digital communications; and
remote AutoZero capability. The Mini-SCI controller is supplied
in a compact, panel mount enclosure and is CE compliant.
The Model dFFOZ Dissolved Ozone Sensor is the latest addition
to the AFX® Series of ozone instrumentation designed and manufactured
by IN USA, Inc. in Needham, MA. IN USA, Inc. is
a recognized world leader in Ozone Instrumentation and Control
and offers a complete line of instruments for measurement of ozone
in air and liquid phases, including process ozone (high concentrations),
ambient ozone (low concentrations), stack gas ozone (low concentrations),
and dissolved ozone in water.