Teledyne Instruments, Inc.
9970 Carroll Canyon Road,
San Diego, CA 92131, USA
Toll free: 1-800-798-4029
Phone: (1) 781-444-2929

Model dFFOZ™ Dissolved Ozone Sensor
July 3, 1997

IN USA, Inc. has recently introduced the Model dFFOZ™, a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench systems and many other industrial processes. The Model dFFOZ Sensor provides continuous, in-situ, in-line measurement of dissolved ozone in deionized water over the concentration range of 0 to 150 milligrams/liter.

The Model dFFOZ Sensor is a "smart", plug-in sensor with on-board calibration data, and is quickly and easily installed. It incorporates IN USA 's innovative dual optical-path sample sensing technology to provide unparalleled performance and virtually eliminate the need for a reference gas measurement.

The Model dFFOZ Sensor is housed in a very compact, fire-retardant polypropylene (FRPP) enclosure fitted with purge ports(other enclosures available). Inlet/Outlet ports are industry-standard 3/4" Flaretek® fittings. It is designed to be installed in-line right at the Wet Bench Cleaning bath, thereby eliminating the waste and inconvenience necessitated by side-stream sampling. The Model dFFOZ Sensor is "clean-ready" for high purity semiconductor processes, and can be installed in a full-flow recirculating stream at flow rates up to 150 SLPM.

The Model dFFOZ sensor uses UV (ultraviolet) absorption to make an absolute, high-accuracy measurement of ozone concentration that is ozone specific and is not affected by background contaminants in the process stream. The low-pressure, mercury vapor UV lamp is the only component requiring scheduled maintenance, and typically lasts up to 24 months.

A typical installation consists of the Model dFFOZ Sensor, a controller (Mini-SCI or SCI-Mux), and an interconnecting Teflon®-jacketed cable.

The Mini-SCI Controller provides powerful, microprocessor-based control, display, and output capabilities. It includes a 20-character alphanumeric, backlit LCD; 0-10 VDC and 4-20 mA opto-isolated analog outputs; bi-directional RS232 digital communications; and remote AutoZero capability. The Mini-SCI controller is supplied in a compact, panel mount enclosure and is CE compliant.

The Model dFFOZ Dissolved Ozone Sensor is the latest addition to the AFX® Series of ozone instrumentation designed and manufactured by IN USA, Inc. in Needham, MA. IN USA, Inc. is a recognized world leader in Ozone Instrumentation and Control and offers a complete line of instruments for measurement of ozone in air and liquid phases, including process ozone (high concentrations), ambient ozone (low concentrations), stack gas ozone (low concentrations), and dissolved ozone in water.
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